Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1998.08a
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- Pages.108.2-108
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- 1998
EFFECT OF THE ROUGHNESS OF SUBSTRATE SURFACE ON LOW-TEMPERATURE SILICON EPITAXIAL GROWTH
- Kwon, Sung-Ku (Dept. of Chemical Engineering, KAIST) ;
- Kim, Dong-Ho (Dept. of Chemical Engineering, KAIST) ;
- Kim, Do-Hyun (Dept. of Chemical Engineering, KAIST)
- Published : 1998.08.01
Abstract
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