Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.07a
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- Pages.866-869
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- 2001
Etching Characteristics BST Thin Film in $CF_4$ /Ar Plasma
$CF_4$ /Ar 플라즈마에 의한 BST 박막 식각 특성
Abstract
In this study, (Ba,Sr)TiO