한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 하계학술대회 논문집
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- Pages.338-341
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- 2002
스마트 파워 IC에의 활용을 위한 소형 LTEIGBT의 제작과 전기적인 특성에 관한 연구
A Study of The Electrical Characteristics of Small Fabricated LTEIGBTs for The Smart Power ICs
초록
A new small size Lateral Trench Electrode Insulated Gate Bipolar Transistor (LTEIGBT) is proposed and fabricated to improve the characteristics of device. The entire electrode of LTEIGBT is placed to trench type electrode. The LTEIGBT is designed so that the width of device is 19