Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2006.06a
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- Pages.392-393
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- 2006
Fabrication of SiCN Microstructures for Super-High Temperature MEMS and Its Characteristics
초고온 MEMS용 SiCN 미세구조물 제작과 그 특성
- Lee, Gyu-Chul (Univ. of Ulsan) ;
- Chung, Gwiy-Sang (Univ. of Ulsan)
- Published : 2006.06.22
Abstract
This paper describes the fabrication of SiCN microstructures for super-high temperature MEMS using photopolymerization of pre-ceramic polymer. In this work. polysilazane liquide as a precursor was deposited on Si wafers by spin coating. microstructured and solidificated by UV lithography. and removed from the substrate. The resulting solid polymer microstructures were cross-linked under HIP process and pyrolyzed to form a ceramic of withstanding over