Development of flexible 3.5' QCIF (176 X144 pixels) OTFT driven OLED;Integration technologies compatible with normal semiconductor processes

  • Kang, Seung-Youl (Electronics and Telecommunications Research Institute) ;
  • Ahn, Seong Deok (Electronics and Telecommunications Research Institute) ;
  • Oh, Ji-Young (Electronics and Telecommunications Research Institute) ;
  • Kim, Gi-Hyun (Electronics and Telecommunications Research Institute) ;
  • Koo, Jae Bon (Electronics and Telecommunications Research Institute) ;
  • You, In-Kyu (Electronics and Telecommunications Research Institute) ;
  • Kim, Chul-Am (Electronics and Telecommunications Research Institute) ;
  • Hwang, Chi-Sun (Electronics and Telecommunications Research Institute) ;
  • KoPark, Sang-Hee (Electronics and Telecommunications Research Institute) ;
  • Yang, Yong-Suk (Electronics and Telecommunications Research Institute) ;
  • Chung, Sung-Mook (Electronics and Telecommunications Research Institute) ;
  • Lee, Jeong-Ik (Electronics and Telecommunications Research Institute) ;
  • Chu, Hye-Yong (Electronics and Telecommunications Research Institute) ;
  • Suh, Kyung-Soo (Electronics and Telecommunications Research Institute)
  • Published : 2007.08.27

Abstract

Conventional semiconductor processes have been utilized to fabricate 3.5-inch OTFT-driven OLEDs with a resolution of $176\;{\times}\;144$ pixels on plastic substrates. By using a PC-OVD method to deposit a pentacene layer and optimizing patterning and the following processes, we could complete a uniform and reliable integration procedure for an active matrix organic light emitting devices on a plastic substrate. The technical importance of ours is the applicability of conventional semiconductor process to organic materials on plastic substrates. Although there are many hurdles to overcome, our approach and technical improvements are proved to be applicable to plastic electronics.

Keywords