한국정보디스플레이학회:학술대회논문집
- 2007.08a
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- Pages.190-192
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- 2007
Hyper Neutral Beam System for Damage Free Deposition of Indium-Tin Oxide Thin Films at Room Temperature
- Yoo, Suk-Jae (National Fusion Research Center) ;
- Kim, Dae-Chul (National Fusion Research Center) ;
- Kim, Jong-Sik (National Fusion Research Center) ;
- Oh, Kyoung-Suk (National Fusion Research Center) ;
- Lee, Bong-Ju (National Fusion Research Center) ;
- Choi, Soung-Woong (Dept. of Information Technology, Handong Global University) ;
-
Park, Young-Chun
(Dept. of Information Technology, Handong Global University)
;
-
Jang, Jin-Nyoung
(Dept. of Display and Semiconductor Physics, Korea University)
;
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Hong, Mun-Pyo
(Dept. of Display and Semiconductor Physics, Korea University)
- Published : 2007.08.27
Abstract
A neutral beam system has been developed to produce hyperthermal neutral beams composed of indium, tin, and oxygen atoms. Using these hyper thermal neutral beams with energies in the range of tens of eV, high quality indium-tin oxide (ITO) thin films have been obtained on glass substrates at room temperature. The optical transmittance of the films is higher than 85% at a wavelength of 550 nm and the electrical resistivity is lower than