An Experiment on Performance Evaluation of Energy Consumption of an Exhaust Air Heat Recovery Type Air Washer for Semiconductor Manufacturing Clean Rooms

반도체 클린룸용 배기 열회수식 에어와셔의 에너지 소비량 성능평가 실험

In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from outdoor air introduced into clean room. Meanwhile, there is a large quantity of exhaust air from clean room. From the energy saving point of view, heat recovery is useful for the reduction of air conditioning energy consumption for clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. However, so far there have not been sufficient studies of analyzing the comparison of the amounts of energy consumption and saving. In the present study, an experiment was conducted to investigate the energy consumption and heat recovery of a fin-coil type air washer system for semiconductor manufacturing clean rooms.