참고문헌
- 전기학회논문지 v.1 Si-tip FEA의 제조 및 동작 특성 평가 주병권;이상조;이윤희;전동렬;오명환
- 전기학회논문지 Si-tip FEA에 있어서 DLC 코팅이 전계 방출 특성에 미치는 영향 주병권;이상조;이윤희;전동렬;오명환
대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)
- 제48권8호
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- Pages.577-579
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- 1999
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- 1229-246X(pISSN)
DLC-coated Si-tip FEA 제조에 있어서 Al 희생층을 이용한 게이트 누설 전류의 감소
Decrease of Gate Leakage Current by Employing AI Sacrificial Layer in the DLC-coated Si-tip FEA Fabrication
초록
DLC film remaining on device surface could be removed by eliminating AI sacrificial layer as a final step of lift-off process in the fabrication of DLC-coated Si-tip FEA. The field emission properties(I-V curves, hysteresis, and current fluctuation etc.) of the processed device were analyzed and the process was employed to 1.76 inch-sized FEA panel fabrication in order to evaluate its FED applicability.
키워드