전자빔 가공을 위한 전자빔 광학 해석에 관한 연구

Study on Electron Optic Analysis for Electron-beam Processes

  • 이응기 (공주대학교 기계자동차공학부 기계공학)
  • 발행 : 2008.03.01

초록

키워드

참고문헌

  1. Legge, G. J. F., O'Brien, P. M., Sealock, R. M., Allan, G. L., Bench, G., Moloney, G., Jamieson, D. N. and Mazzolini, A. P., "The design of a versatile scanning proton microprobe of high resolution and efficiency," Nuclear Instruments and Methods in Physics Research B, Vol. 30, Issue 3, pp. 252-259, 1988 https://doi.org/10.1016/0168-583X(88)90006-7
  2. Jerby, E., "Angular steering of the free-electron-laser far-field radiation beam," Physical review A, Vol. 41, No. 7, pp. 3804-3811, 1990 https://doi.org/10.1103/PhysRevA.41.3804
  3. Rebrow, V. A., Ponomarev, A. G., Palchik, V. K. and Melnik, N. G., "The new design of magnetic quadrupole lens doublet manufactured from a single piece," Nuclear Instruments and Methods in Physics Research B, Vol. 260, Issue 1, pp. 34-38, 2007 https://doi.org/10.1016/j.nimb.2007.01.275
  4. Edgcombe, C. J., Lupini, A. R. and Taylor, J. H., "Robust optimization for magnetic lens design," Nuclear Instruments and Methods in Physics Research A, Vol. 427, Issue 1-2, pp. 306-309, 1999 https://doi.org/10.1016/S0168-9002(98)01537-X
  5. Alamir, A. S. A., "Ultimate performance of objective magnetic lens," Ultramicroscopy, Vol. 101, Issue 2-4, pp. 241-246, 2004 https://doi.org/10.1016/j.ultramic.2004.05.011
  6. Mottershead, T., Barlow, D., Blind, B., Hogan, G., Jason, A., Merrill, F., Morley, K., Morris, C., Saunders, A. and Valdiviez, R., "Design and operation of a proton microscope for radiography at 800 MeV," Proceeding of the Particel Acceleration Conference, pp. 702-704, 2003
  7. Mankos, M., Adler, D., Veneklasen, L. and Munro, E., "Electron optics for high throughput low energy electron microscopy," Surface Science, Vol. 601, Issue 20, pp. 4733-4741, 2007 https://doi.org/10.1016/j.susc.2007.05.062