한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제25권3호
  • /
  • Pages.23-31
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  • 2008
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

FIB-Sputtering 가공공정기술 및 응용분야 연구

FIB-Sputtering Process Technology and Its Application

  • 강은구 (한국생산기술연구원 e가공공정팀) ;
  • 최병열 (한국생산기술연구원 e가공공정팀) ;
  • 홍원표 (한국생산기술연구원 e가공공정팀) ;
  • 이석우 (한국생산기술연구원 e가공공정팀) ;
  • 최헌종 (한국생산기술연구원 e가공공정팀)
  • 발행 : 2008.03.01
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참고문헌

  1. Reyntjens, S. and Puers, R., "A review of focused ion beam applications in microsystem technology," Journal of Micromechanics and Microengineering, Vol. 11, Issue 4, pp. 287-300, 2001 https://doi.org/10.1088/0960-1317/11/4/301
  2. Choi, H. Z., Kang, E. G., Lee, S. W. and Hong, W. P., "Development of Nano Machining Technology using Focused Ion Beam," The Korean Society of Machine Tool Engineers Spring Conference, pp.482-486, 2004
  3. Kang, E. G., Choi, B. Y., Hong, W. P., Lee, S. W. and Choi, H. Z., "Nano-Patterning Characteristics using FIB-Sputtering Technology for DVD Mold," J. of the KITECH, Vol. 16, No. 7, pp.158-169, 2007
  4. Choi, H. Z., Hong, W. P., Kang, E. G., Choi, B. Y. and Lee, S. W., "Analysis on FIB-Sputtering Process using Taguchi Method," Transctions of the Korean Society of Machine Tool Engineers, Vol.15, No.6, pp.72-75, 2006
  5. Lee, S. W., Kang, E. G., Choi, B. Y., Hong, W. P. and Choi, H. Z., "Analysis of FIB-Sputtering Characteristicson Glassy Carbon," Korean Society for Precision Engineering Spring Conference, pp.767-768, 2007
  6. Youn, S. W., Takahashi, M., Goto, H. and Maeda, R., "Fabrication of micro-mold for glass embossing using focused ion beam, femto-second laser, eximer laser and dicing techniques," Journal of Materials Processing Technology, Vol. 187-188, pp.326-330, 2007 https://doi.org/10.1016/j.jmatprotec.2006.11.120
  7. Youn, S. W., Takahashi, M., Goto, H. and Maeda, R., "Microstructuring of glassy carbon mold for glass embossing - Comparison of focused ion beam, nano/femtosecond-pulsed laser and mechanical machining," Microelectronic Engineering, Vol. 83, pp.2482-2492, 2006 https://doi.org/10.1016/j.mee.2006.05.007
  8. Watanabe, K., Morita, T. and Kometani, R., "Nanoimprint using three-dimensional microlens mold made by focused-ion-beam chemical vapor deposition," J. Vac. Sci. Technol. B, Vol. 22, No. 1, pp.22-26, 2004 https://doi.org/10.1116/1.1633281
  9. Kang, E. G., Lee, S. W., Choi, H. Z. and Hong, W. P., "Micro Mold Fabrication Process by Focused Ion Beam using Amorphous Materials," Korea Patent Pending, No. 10-2007-0035048, 2007
  10. Takahashi, M., "Micro/Nano Hot Embossing of Quartz Glass Materials with Glassy Carbon Mold Prepared by Focused Ion Beam," The KITECH-AIST Joint Workshop on Micro/Nano Fabrication Technology, pp.19-44, 2007