Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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Morphological study on non-seeded grown AlN single crystals

무종자결정 상에 성장된 AlN 결정의 형태학적 연구

  • Kang, Seung-Min (Department of Advanced Materials Science and Engineering, Hanseo University)
  • Received : 2012.10.25
  • Accepted : 2012.12.07
  • Published : 2012.12.31
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Abstract

The growth of AlN single crystals of large size and good quality is of prime importance for UV LEDs and power devices applications. However, the crystals having the size of more than 1 inch and high quality have not been reported in the world. In the PVT growth of AlN, the crystal morphology of as grown were important because the preferred orientation of growth of it was evaluated for growth rate increase. In the present study, the AlN single crystals grown by PVT process were evaluated by the side of the growth morphology. Optical microscopic characterization was carried out to observe the shape of the crystals and the growth facets. Furthermore the growth habit of it were discussed by observation of the surface of AlN crystals.

대형의 고품질 AlN 단결정은 자외선 LED 및 전력 반도체 소자용으로 중요성이 크다. 그러나, 아직 1인치급의 고품질 단결정에 대해서는 보고된 바가 없다. AlN 성장을 위한 PVT 공정에서는 성장 속도 증가를 위하여 성장 결정의 형상을 고찰하는 것이 매우 중요하다. 본 연구에서는 PVT 공정으로 성장된 AlN 결정의 성장 형태에 대하여 고찰하였다. 광학현미경을 이용하여 결정의 형태와 성장 facet에 대하여 관찰하고, 결정의 성장 습성과 관련하여 고찰하였다.

Keywords

References

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