Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지
DOI QR코드

DOI QR Code

Design and Manufacturing of an Ultrasonic Waveguide for Nano-surface Treatment

나노표면개질 용 초음파 진동자 설계 및 제작

  • Kim, Hyunse (Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials) ;
  • Lee, Yanglae (Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials) ;
  • Lim, Euisu (Extreme Mechanical Engineering Research Division, Korea Institute of Machinery and Materials)
  • 김현세 (한국기계연구원 극한기계연구본부) ;
  • 이양래 (한국기계연구원 극한기계연구본부) ;
  • 임의수 (한국기계연구원 극한기계연구본부)
  • Received : 2014.10.20
  • Accepted : 2014.11.17
  • Published : 2014.12.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this article, a 20 kHz ultrasonic waveguide for nano-surface treatment was designed and manufactured. When designing the system, finite element analysis with ANSYS software was performed to find optimal dimensions of the waveguide, which can raise energy efficiency. Consequently an anti-resonance frequency of an Al waveguide with a piezoelectric actuator was 20 kHz, which predicted the experimentally obtained value of 18 kHz well. For the assessment of the performance, Steel Use Stainless (SUS) 304 and chromium molybdenum steel (SCM) 435 specimens were tested. Cross-sectional microscopies of SUS304 were taken and they showed that the treated thickness was $30{\mu}m$. Additionally, hardness tests of SCM435 were done and the hardness before the process was 14.0 Rockwell Hardness-C scale (HRC) and after the process was 20.5 HRC, respectively, which means 46% increase. Considering these results, the developed ultrasonic system is thought to be effective in the nano-surface treatment process.

Keywords

References

  1. Amanov, A., Pyun, Y.-S., and Sasaki, S., "Effects of Ultrasonic Nanocrystalline Surface Modification (UNSM) Technique on the Tribological Behavior of Sintered Cu-based Alloy," Tribology International, Vol. 72, pp. 187-197, 2014. https://doi.org/10.1016/j.triboint.2013.12.003
  2. Amanov, A., Penkov, O. V., Pyun, Y.-S., and Kim, D. -E., "Effects of Ultrasonic Nanocrystalline Surface Modification on the Tribological Properties of AZ91D magnesium alloy," Tribology International, Vol. 54, pp. 106-113, 2012. https://doi.org/10.1016/j.triboint.2012.04.024
  3. Amanov, A., Cho, I. -S., Kim, D. -E., and Pyun, Y. - S., "Fretting Wear and Friction Reduction of CP Titanium and Ti-6AL-4V Alloy by Ultrasonic Nanocrystalline Surface Modification," Surface and Coatings Technology, Vol. 207, pp. 135-142, 2012. https://doi.org/10.1016/j.surfcoat.2012.06.046
  4. Kim, H., Lee, Y., and Lim, E., "Design and Fabrication of an L-type Waveguide Megasonic System for Cleaning of Nano-Scale Patterns," Current Applied Physics, Vol. 9, pp. e189-e192, 2009. https://doi.org/10.1016/j.cap.2008.12.058
  5. Kim, H., Lee, Y., and Lim, E., "Design and Fabrication of a Horn-Type Megasonic Waveguide for Nanoparticle Cleaning," IEEE Transactions on Semiconductor Manufacturing, Vol. 26, No. 2, pp. 221-225, 2013. https://doi.org/10.1109/TSM.2013.2238563
  6. Kim, H., Lee. Y., and Lim, E., "A Quartz-Bar Megasonic System for Nano-Pattern Cleaning," Int. J. Precis. Eng. Manuf., Vol. 14, No. 10, pp. 1713-1718, 2013. https://doi.org/10.1007/s12541-013-0230-8