Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
권호 표지
DOI QR코드

DOI QR Code

Precise Measurement of the Ultrasmall Optical Anisotropy of Rubbed Polyimide Using an Improved Reflection Ellipsometer

반사형 타원계를 이용한 러빙된 Polyimide 배향막의 초미세 광학 이방성 정밀 측정

  • Received : 2015.06.12
  • Accepted : 2015.07.01
  • Published : 2015.08.25
Download PDF
⟨ Previous Next ⟩

Abstract

We developed a reflection ellipsometer so that one can measure the extremely small optical anisotropy of a rubbed polyimide alignment layer, without being disturbed by the residual anisotropy of the substrate. The optical anisotropy of the alignment layer was measured as rubbing strength was increased, and the measured anisotropy was compared to the retardation obtained by using a transmission-type ellipsometer, to confirm the reliability of our reflection ellipsometer. With this measured anisotropy we could verify the formation of an alignment layer by rubbing, and could quantitatively evaluate the formation of the alignment layer.

기층의 잔류 이방성에 영향을 받지 않고 러빙된 폴리이미드 배향막의 초미세 광학 이방성을 정밀하게 측정할 수 있는 반사형 타원계를 개발하고 러빙의 세기를 달리하여 제작한 배향막의 광학이방성을 이 반사형 타원계를 사용하여 측정, 분석하였다. 투과형 타원계를 사용하여 측정한 리타데이션과 비교하여 개발된 반사형 타원계의 신뢰도 및 광학 이방성의 측정 재현성을 확인하고 배향막의 형성 여부와 배향막의 형성정도를 정량적으로 평가하였다

Keywords

References

  1. H. J. Ahn and S. H. Paek, "Analysis of properties of rubbed polyimide alignment layer and rubbing effect of various rubbing cloths for LCD fabrication," Polymer Korea 35, 385-389 (2011).
  2. W. C. Kim, "Study on the LC alignment on vertical alignment polymer surface using the AFM," Journal of KIEEME 16, 510-514 (2003).
  3. J. H. Kim and H. Yokoyama, "Nano-rubbing of a liquid crystal alignment layer by an atomic force microscope : a detailed characterization," Nanotechnology 13, 133-137 (2002). https://doi.org/10.1088/0957-4484/13/2/301
  4. C. Yu, J. Bae, C. M. Keum, and S. D. Lee, "Optical anisotropy of aligned pentacene molecules on a rubbed polymer corresponding to the electrical anisotropy," Current Applied Physics 10, 64-67 (2010). https://doi.org/10.1016/j.cap.2009.04.013
  5. J. A. Ekhoff, M. J. Farrow, D. M. Walba, and K. L. Rowlen, "Molecular orientation of a model liquid crystal alignment layer," Talanta 60, 801-808 (2003). https://doi.org/10.1016/S0039-9140(03)00141-3
  6. G. Fang, J. Maclennan, and N. Clark, "High extinction polarimeter for the precision measurement of the in-plane optical anisotropy of molecular monolayers," Langmuir 26, 11686-11689 (2010). https://doi.org/10.1021/la101117n
  7. H. Murai, K. Ekawa, J. Takashima, H. Naito, and N. Nakatsuka, "Mura-detection method by using a slit-beam ellipsometer," J. SID 15, 281-286 (2007).
  8. Y. L. Lo, J. F. Lin, and S. Y. Lee, "Polariscope for simultaneous measurement of the principal axis and the phase retardation by use of two phase-locked extractions," Appl. Opt. 43, 6248-6254 (2004). https://doi.org/10.1364/AO.43.006248
  9. M. Hideyuki, E. Koichi, T. Jun, N. Hitoshi, and N. Nobuo, "Useful inspection method of rubbed polyimide film with optical anisotropy using reflection ellipsometry," SID Symposium Digest 37, 490-493 (2006).
  10. S. Y. Kim, Ellipsometry (Ajou University Press, Gyeonggi, Korea, 2000), Chapter 3-4.
  11. Y. S. Shin, M. S. Thesis, Ajou University, Suwon (2009).
  12. K. H. Lyum, S. U. Park, S. M. Yang, H. K. Yoon, and S. Y. Kim, "Precise measurement of ultra small retardation of LCD alignment layer using improved transmission ellipsometry," J. Korean Phys. Soc. 24, 77-85 (2013).
  13. R. A. Synowicki, "Suppression of backside reflections from transparent substrates," Phys. Stat. Sol. 5, 1085-1088 (2008). https://doi.org/10.1002/pssc.200777873
  14. Y. J. Seo and S. Y. Kim, "Analysis of the spectro-ellipsometric data with backside reflection from semi-transparent substrate by using a rotating polarizer ellipsometer," Korean J. Opt. Photon. (Hankook Kwanghak Hoeji) 22, 170-178 (2011). https://doi.org/10.3807/KJOP.2011.22.4.170
  15. H. K. Yoon, M. S. Thesis, Ajou University, Suwon (2014).
  16. H. J. Ahn, J. J. Lee, J. S. Ahn, and K. C. Park, "Analysis of properties of rubbed polyimide alignment layer and rubbing effect of various rubbing cloths LCD fabrication," Polymer 35, 385-389 (2011).
  17. S. Y. Kim, "Ellipsometric expressions of multilayered substrate coated with a uniaxially anisotropic alignment layer," Korean J. Opt. Photon. (Hankook Kwanghak Hoeji) 24, 271-278 (2013). https://doi.org/10.3807/KJOP.2013.24.5.271
  18. S. Y. Kim, "Ellipsometric expressions for two uniaxially anisotropic layers coated on a multilayered substrate," Korean J. Opt. Photon. (Hankook Kwanghak Hoeji) 26, 115-120 (2015). https://doi.org/10.3807/KJOP.2015.26.2.115

Cited by

  1. Ellipsometric Expressions for a Sample Coated with Uniaxially Anisotropic Layers vol.26, pp.5, 2015, https://doi.org/10.3807/KJOP.2015.26.5.275