Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Plasma Resistance of YAS (Y2O3-Al2O3-SiO2) Coating Layer with YAG Phase Contents

YAG 상함량에 따른 YAS (Y2O3-Al2O3-SiO2)계 코팅층의 내플라즈마 특성

  • Park, Eui Keun (Department of Advanced Materials Science and Engineering, Kumoh National Institute of Technology) ;
  • Lee, Hyun-Kwuon (Department of Advanced Materials Science and Engineering, Kumoh National Institute of Technology)
  • 박의근 (금오공과대학교 신소재공학과) ;
  • 이현권 (금오공과대학교 신소재공학과)
  • Received : 2020.09.24
  • Accepted : 2020.10.14
  • Published : 2020.11.27
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Abstract

This study is aimed at preparing and evaluating the plasma resistance of YAS (Y2O3-Al2O3-SiO2) coating layer with crystalline YAG phase contents. For this purpose, YAS frits with controlled phase contents are prepared and melt-coated on sintered Al2O3 ceramics. Then, the results of phase analysis of crystalline YAS coating layer are compared to that of YAS frits, and discussed with regard to the plasma resistance of the YAS coating layer. The phase contents of the YAS frit change in a manner different from that of the prepared YAS coating layer, presumably owing to the composition change of YAS frit during the melt-coating process. The plasma resistance of the YAS coating layer is shown to increase with the YAG phase contents in the coating layer. Comparing the weight loss of YAS coating layer with those of commercial Y2O3, Al2O3, and quartz ceramics, the plasma resistance of the prepared YAS coating layer is 8 times higher than that of quartz and 3 times higher than that of Al2O3; this layer shows 70 % of the resistance of Y2O3.

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References

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