A pulsed laser ablation deposition (PLAD) technique is an excellent method for the fabrication of amorphous carbon (a-C) films, because it can generate highly energetic carbon clusters on a substrate. This paper was focused on the understanding and analysis of the motion of C particles in laser ablation assisted by Ar plasmas. The simulation has carried out under the pressure P=50 mTorr of Ar plasmas. Two-dimensional hybrid model consisting of fluid and Monte-Carlo models was developed and three kinds of the ablated particles which are carbon atom (C), ion ($C^+$) and electron were considered in the calculation of particle method. The motions of energetic $C^+$ and C deposited upon the substrate were investigated and compared. The interactions between the ablated particles and Ar gas plasmas were discussed.

Monolayers of lipids on a water surface have attracted much interest as models of biological membranes, but also as precursors of multilayer systems promising many technical applications. Until now, many methodologies have been developed in order to gain a better understanding of the relationship between the structure and function of the monolayers. Maxwell displacement current (MDC) measurement has been employed to study the dielectric property of Langmuir-films. MDC flowing across monolayers is analyzed using a rod-like molecular model. A linear relationship between the monolayer compression speed and the molecular area Am. Compression speed was about 30, 40, 50mm/min. Langmuir-Blodgett(LB)layers of Arachidic acid deposited by LB method were deposited onto slide glass as Y-type film. The structure of manufactured device is Au/Arachidic acid/Al, the number of accumulated layers are 9~21. Also, we then examined of the Metal-Insulator-Metal(MIM) device by means of I-V. The I-V characteristics of the device are measured from -3 to +3[V]. The insulation property of a thin film is better as the distance between electrodes is larger.

We have synthesized electroluminescence materials. including [2-(2-hydroxyphenyl)benzoxazole] (Zn(HPB)$_2$), [(2-(2-hydroxyphenyl)benzoxazole)(8-hydoxyquinoline)] (Zn(HPB)q) and [(1, 10-phenanthroline)(8-hydroxyquinoline)] Zn(phen)q. The ionization potential (IP) and electron affinity (EA) of each Zn-complex was measured using cyclic-voltammetry (C-V). Basing on the consideration of matched in the energy levels of the materials. We investigated the electron transporting properties of Zn(HPB)q and Zn(phen)q compared with $Alq_3$, and also we investigated the hole blocking properties of Zn(HPB)$_2$, compared with BCP. As a result, we used Zn-complex to enhance the performance of OLED. Therefore, we demonstrate that Zn(HPB)q and Zn(phen)q are useful as an electron transporting material. Zn(HPB)$_2$ is also good a hole blocking material.

In this paper, the undoped and Co-doped $Zn_4SnSe_6$ single crystals grown by the chemical transporting reaction(CTR) method using iodine as a transporting agent are investigated. For the crystal growth, the temperature gradient of the CTR furnace was kept at $680^{\circ}C$ for the source zone and at $780^{\circ}C$ for the growth zone for 7days. It was found from the analysis of x-ray diffraction that the $Zn_4SnSe_6$ and $Zn_4SnSe_6Co^{2+}$ compounds have a monoclinic structure. The direct optical energy band gap of the $Zn_4SnSe_6$ and $Zn_4SnSe_6Co^{2+}$ single crystals at 300K were found to be 2.146eV and 2.042eV.

In this study, $(Ba_{0.7}\;Sr_{0.3})TiO_3$ was coated on Pt/Ti/$SiO_2$/Si wafer by using Sol-Gel method. Coating process was repeated 3~5 times and then sintered at 750[$^{\circ}C$] for 1 hour. Each specimen was analyzed structure and electrical characteristics. In structure characteristics, EDX analyzed the samples ratio of the formation on the structural property. Thermal behavior was observed with TG-DTA and concluded that the heat-treatment of the samples was degreed 750[$^{\circ}C$]. Surface and section of thin films were observed with SEM.

최근 전기에너지의 사용비율은 해가 거듭될수록 증가되고 있으며, 경량화 소형화로 인한 전력기기의 스트레스가 증가되었다. 또한 고압송전으로 인해 전기적 사고는 대형사고를 유발하므로 전력기기의 수명예측은 매우 중요한 과제이다. 이에 본 논문에서는 XLPE 절연체의 보이드 유무에 따른 부분방전 패턴을 K-means 분포통계함수를 이용하여 부분방전 패턴의 그룹화를 시도하였다. 또한 전하량과 방전빈도수의 분포를 비교하기 위해 위상-전하랑 및 위상-전하량-빈도수에 의한 그룹의 centroid 이동 변화에 대하여 조사하였다. 그 결과 보이드가 존재하는 경우 전하량의 높은 점에서 중심점을 형성하였고, 방전발생위상의 차이는 크지 않았다. 또한 위상-전하량의 클러스터보다 위상-전하량-빈도수의 클러스터에서 객체간 편차가 더 커짐을 발견하였다.

The study on laser-ablation plasmas has been strongly interested in fundamental aspects of laser-solid interaction and consequent plasma generation. In particular, this plasma has been widely used for the deposition of thin solid films and applied to the semiconductors and insulators. In this paper, we developed and discussed the generation of carbon ablation plasmas emitted by laser radiation on a solid target, graphite. The progress of carbon plasmas by laser-ablation was simulated using Monte-Carlo particle model under the pressures of vacuum, 1 Pa, 10 Pa and 66 Pa. At the results, carbon particles with low energy were deposited on the substrate as the pressure becomes higher. However, there was no difference of deposition distributions of carbon particles on the substrate regardless of the pressure.

We investigated the analysis of operation mode of three-phase flux-lake type superconducting fault current limiter(SFCL). The structure of the integrated three-phase flux-lock type SFCL consisted of three-phase flux-lock reactor wound on an iron core with the same turn between coil 1 and coil 2 in each phase. When the SFCL is operated under the normal condition, the flux generated in the iron core is zero because the flux generated between two coils of each single phase is canceled out. Therefore, the SFCL's impedance is zero and the SFCL has negligible influence on the power system, However, if a fault occurs in any single-phase among three phases, the flux generated in the iron core is not zero any more. The flux makes elements of all phase-quench irrespective of the fault type, which reduces the current of fault phase as well as the current of sound phase.

Ternary chalcopyrite $CuInS_2$ thin film material is very promising for photovoltaic. Power generation because of its excellent optical and semiconductor properties, $CuInS_2$ thin films were performed from S/In/Cu/SLG stacked elemental layer (SEL) method with post annealing treatment. $CuInS_2$ thin films were appeared from 0.84 to 1.27 of Cu/In composition ratio and sulfur composition ratios of $CuInS_2$ thin films fabricated. Analysis of the optical energy band gap of $CuInS_2$ value of l.5eV interior and exterior.

In the Langmuir-Blodgett (LB) technique, a monolayer on the water surface is transferred onto a substrate, which is raised and dipped through the surface. From this, multi layers can be obtained in which constituent molecules are periodically arranged. The LB technique has attracted considerable interest in the fabrication of electrical and electronic devices. Many researchers have investigated the electrical properties of monolayer and multiplayer films. Dendrimers represent a new class of synthetic macromolecules characterized by a regularly branched treelike structure. Multiple branching yields a large number of chain ends that distinguish dendrimers from conventional star-like polymers and microgels. The azobenzene dendrimer is one of the dendritic macromolecules that include the azo-group exhibiting a photochromic character. Due to the presence of the charge transfer element of the azo-group and its rod-shaped structure, these compounds are expected to have potential interest in electronics and ptoelectronics, especially in nonlinear optics. In the present paper, we give pressure stimulation to organic thin films and detect the induced displacement current.

Thermally stable and solution-processable poly(N-arylcarbazole-alt-aniline) copolymers with high structural integrity were synthesized in good yields via palladium-catalyzed polycondensation of aniline with corresponding N-arylcarbazole monomers such as N-(2-ethylhexyloxyphenyl)-3,6-dibromocarbazole,bis[6-bromo-N-(2-ethylhexyloxyphenyl)carbazole-3-yl] and N-(4-(2-ethylhexyl)-3,5-dibromomethylene-phenyl) carbazole, respectively. The optical and electrochemical properties of these copolymers were measured and compared with those of poly(N-alkylcarbazole-alt-aniline) copolymer. All synthesized poly(N-arylcarbazole-alt-aniline) copolymers showed maximum UV-Vis absorption peaks at around 300 nm in THF solution, and exhibited maximum photoluminescence peaks in the blue emission range from 430 to 460 nm. It was also found that poly(N-arylcarbazole-alt-aniline) copolymers had wider band gap energy than poly(N-alkylcarbazole-alt-aniline) copolymer.

본 연구에서는 대표적인 양친매성분자인 Arachidic acid를 이용하여 박막을 제작하였으며, 층수 변화에 따른 표면이미지와 전압-전류 특성을 측정하였다. Arachidic acid 는 포화지방산으로 ($CH_3(CH_2)_{18}$ COOH)의 구조를 가지며, 크기가 $27.5{\AA}$으로 $CH_3(CH_2)_{18}$의 소수기와 COOH의 친수기로 구성되어 있어, Langmuir-Blodgett (LB) Trough을 사용하여 박막제작과 분자제어가 쉽다. Chloroform을 용매로 하여 2 mmol/l의 농도를 조성하여 ${\pi}$-A 등온선을 통해 기체 상태, 액체 상태, 고체 상태를 관찰하였다. LB 막의 제작 및 평가에서 막의 안정성은 ${\pi}$-A 곡선, AFM(Atomic force microscopy) 등을 통하여 확인하였다. 또한 LB 막을 Metal/유기물 LB막/Metal 구조의 소자로 제작하여 전압-전류 특성을 측정하였다.

본 연구에서는 광에너지를 화학적인 에너지로 변환할 때, 디바이스의 전하전달 매개를 위한 electron transfer mediator로서 널리 이용되는 Viologen이 자기조립화된 수정진동자률 전기화학법의 하나인 순환전압전류법(Cyclic Voltammetry)을 이용하여 산화 환원 반응 (redox reaction) 특성과 주사속도와 피크전류와의 상관관계를 분석하였다. 먼저 수정진동자를 친수 처리한 후, 메탄올 용액과 아세토니트릴 용액을 섞은 용매에 Viologen 분자를 자기조립 (self-assembly)하여, 전해질 용액의 농도 변화에 따른 산화 환원반응 특성과 피크전류의 값을 측정하였다 주사 속도를 2 배씩 증가하여 피크전류와의 상관관계를 조사한 결과, 선형적인 증가를 보였으며, 이를 통해 가역적인 반응(reversible reaction)이 일어났음을 확인할 수 있었다. 또한, 산화 환원 반응과 동시에 측정된 수정진동자의 공진 주파수(resonant frequency) 변화로부터 전하이동(charge transfer) 특성에 의해 반응에 참가한 이온의 질량을 알 수 있었다.

In this study, a DNA chip with a microelectrode array was fabricated using microfabrication technology. Several probe DNAs consisting of mercaptohexyl moiety at their 5 end were immobilized on the gold electrodes by DNA arrayer. Then target DNAs were hybridized and reacted with Hoechst 33258, which is a DNA minor groove binder and electrochemically active dye. Linear sweep voltammetry or cyclic voltammetry showed a difference between target DNA and control DNA in the anodic peak current values. It was derived from Hoechst 33258 concentrated at the electrode surface through association with formed hybrid. It suggested that this DNA chip could recognize the sequence specific genes.

This research aims to develop a multiple channel electrochemical DNA chip using micro- fabrication technology. At first, we fabricated a high integrated type DNA chip array by lithography technology. Several probe DNAs consisting of thiol group at their 5-end were immobilized on the gold electrodes. Then target DNAs were hybridized by an electrical force. Redox peak of cyclic-voltammogram showed a difference between target DNA and mismatched DNA in the anodic peak current. Therefore. it is able to detect a various genes electrochemically after immobilization of a various probe DNA and hybridization of label-free DNA on the electrodes simultaneously. It suggested that this DNA chip could recognize the sequence specific genes.

An external electrode fluorescent lamp (EEFL) has an advantage of a long lifetime in the ear1y stages of the study on plasma discharge, interest in the lamp continues. Researches on the operation of external electrode fluorescent lamps have focused mainly on its use of a type of high frequency (MHz). By performing high brightness using a square wave operation method with the low frequency below 100kHz, which is applied to a narrowed tube type lamp that has several mm of lamp diameter, EEFL presented the possibility of using it as a light source for back-lights. However, because EEFL generates plasma using wall charges, which considers the impedance characteristics of glass based on the structural principle in discharge, it can be significant1y affected by frequency. Thus, this study verified the change in the characteristics of electromagnetic fields according to the change in frequency through a Maxwell's electromagnetic field simulation and examined the relationship between the change in the EEFL frequency and brightness by measuring the optical characteristics. In addition, the characteristics of the transformation of energy orbits were verified by investigating the characteristics of the wavelength according to the change in frequency through the OES.

We report the performance of a four-element, 11.67 GHz, high-Tc superconducting (HTS) microstrip antenna array with corporate feed network and circular polarization for direct broadcasting satellite (DBS) system. Our array antennas were designed and built on a 0.5 mm thick MgO substrate. To compare the superconducting antennas with normal conducting counterpart, One antenna pattern was fabricated from gold thin film, and a second pattern was fabricated from $YBa_2Cu_3O_{7-x}$ (YBCO) superconducting thin film. To improve the axial ratio of circularly polarized arrays, sequential rotation technique were used. Efficiency, radiation pattern, return loss and bandwidth were measured for both antennas at room temperature and at cryogenic temperature. The array produced good circular polarization, and the gain of the array at 77 K, relative to a copper array at room temperature was approximately 1.54 dB. The measured return loss of our HTS antenna array was 35.79 dB at the resonant frequency of 11.67 GHz and The total effective bandwidth was about 3.4 %. The results showed that high-temperature superconductors, when used in microstrip arrays, improved the efficiency of the HTS antenna array for circularly polarization.

As a display becomes large recently, Acquisition of high luminance and Luminance uniformity is becoming difficult in the existing CCFL or EEFL backlight system. So, study for a performance enhancement has enforced. but lamp development of flat type is asked for high luminance and a luminance uniformity security in of LCD and area anger trend ultimately. In this paper, we changed a tip shape of an electrode for production by the most suitable LCD backlight surface light source, and confirmed discharge characteristic along discharge gas pressure and voltage, and confirmed electric field distribution and discharge energy characteristic through a Maxwell 2D simulation. Therefore the discharge firing voltage characteristic showed a low characteristic than a rectangular type and round type in case of electrode which used tip of a triangle type, and displayed a discharge electric current as a same voltage was low.

Discharge of the flat lamp lighting source research are requested very much. For improving brightness, life time, efficiency of flat lamp, plasma diagnosis of the f1at lamp lighting source to understand property of lighting source is very important. Distance of discharge electrode is 5.5mm and width is 16.5mm, we have measured electron temperature and electron density measured with single Langmuir probe in flat lamp. We have tested the discharge from 100 Torr to 300 Torr pressure. The pulse is rectangular pulse with frequency 20kHz and duty ratio 20%. In result, electron temperature decreases and electron density increase as increase the gas pressure and electron temperature decreases and electron density increase as increase the voltage.

In whole world consciousness of environment maintenance have increased very quickly for the end of the 20th century. To use and disuse toxic substances have been controled at the field of industry. Also the field of lighting source belong to environmental control. And in the future the control will be strong. In radiational mechanism of fluorescence lamp mechanism is the worst environmental problem. In radiational mechanism of fluorescence lamp mercury is the worst environmental problem root. In the mercury free lighting source system the Xe gas lamp is one type. And the Ne:Xe mixing gas lamp improvements firing voltage of Xe gas lamp. Purpose and subject of this study are understand, efficiency, ideal of Ne:Xe plasma which mercury free lamp. Before ICP was designed, basic parameters of plasma, which are electron temperature and electron density, were measured and calculated by Langmuir probe data. Property of electron temperature and electron density were confirmed by changing ratio of Ne:Xe.

철도안전법의 제정 및 시행에 즈음하여 철도안전관리에 대한 인식이 제고되고 있는 시점에서 인적요소를 고려한 전기철도안전관리기법을 제시한다. 이를 위해서는 인적신뢰성분석이 필요하나 현재로서는 세계적으로도 이에 관한 규격이 정비되어 가고 있는 실정으로서 국내에서는 규격 적합성 인증 제도가 아직 구축되어 있지 못하고 따라서 규격 정비의 진행에 따라 위험성정보교환에 관련된 대책의 필요성이 증가하고 안전성의 확률론적 정량적평가가 보다 중요시 될 것으로 예상된다. 본고에서는 시스템 위험도분석을 통한 안전공학적 절차를 준수함으로써 위험도를 정량적으로 평가하고 정량적으로 평가된 위험도를 적정 수준으로 관리함으로써 철도시스템 안전관리체계를 향상시킬 수 있는 기법으로서 최근 주목받고 있는 인적신뢰성분석기법과 위험도정보교환에 대한 기본 개념을 제시한다.

BTO ($BaTiO_3$) thin film is one of the high dielectric materials for high-density dynamic random access memories (DRAMs) due to its relatively high dielectric constant, It is generally known that BTO film is difficult to be etched by plasma etching, but high etch rate with good selectivity to pattern mask was required. The problem of sidewall angle also still remained to be solved in plasma etching of BTO thin film. In this study, we first examined the patterning possibility of BTO film by chemical mechanical polishing (CMP) process instead of plasma etching. The sputtered BTO film on TEOS film as a stopper layer was polished by CMP process with the sell-developed $BaTiO_3$- and $TiO_2$-mixed abrasives slurries (MAS). respectively. The removal rate of BTO thin film using the $BaTiO_3$-mixed abrasive slurry ($BaTiO_3$-MAS) was higher than that using the $TiO_2$-mixed abrasive slurry ($TiO_2$-MAS) in the same concentrations. The maximum removal rate of BTO thin film was 848 nm/min with an addition of $BaTiO_3$ abrasive at the concentration of 3 wt%.

In this paper. we first applied the chemical mechanical polishing (CMP) process to the planarization of ferroelectric film in order to obtain a good planarity of electrode/ferroelectric film interlace. $Pb_{1.1}(Zr_{0.52}Ti_{0.48})O_3$ (shortly PZT) ferroelectric film was fabricated by the sol-gel method. And then. we compared the structural characteristics before and alter CMP process of PZT films. Their dependence on slurry composition was also investigated. We expect that our results will be useful promise of global planarization for ferroelectric random access memories (FRAM) application in the near future.

This paper describes a new constructing method of multifunctional biosensor using many kinds of biomaterials. A metal particle and an array was fabricated by photolithographic. Biomaterials were immobilized on the metal particle. The array and the particles were mixed in a buffer solution, and were arranged by magnetic force interaction and random fluidic self-assembly. A quarter of total Ni dots were covered by the particles. The binding direction of the particles was controllable, and condition of particles was almost with Au surface on top. The particles were successfully arranged on the array. The biomaterial activities were detected by chemiluminescence and electrochemical methods.

Nanocrystalline $TiO_2$ electrode were prepared by spray-printing in order to efficiency and improved fill factor. Different compositions of nanocrystalline $TiO_2$ pastes are described, based on $TiO_2$ powder made by ourselves. The produced by spray printing $TiO_2$ films were compare with the produced by squeeze printing $TiO_2$ films and was studied in the light of static I-V characteristics. The produced $TiO_2$ films are extensively characterized by means of spectroscopy(Ramon, XRD) and microscopy(FE-SEM).

This paper a new method which applies a genetic algorithm for determining which sectionalizing switch to operate in order to solve the distribution system loss minimization re-configuration problem. In addition, the proposed method introduces a ultra efficient MPP tracking in a solar power generation system.

자발착화 연소반응법 (Glycine Nitrate Process)을 응용한 초음파분무열분해장치를 이용하여 이차전지의 양극재료인 Ni치환형 $LiMn_2O-4$ 분말을 합성하였고, 각각의 하소온도에 따른 분말의 특성을 평가하였다. 전구용액은 산화제로 $Mn(NO_3)_2{\cdot}6H_20$EX>, $LiNO_3$, $Ni(NO_3)_2{\cdot}6H_20$를 사용하였고, 자발착화 에너지를 공급하기 위한 연료로는 glycine를 사용하였다. 분말의 결정상을 확인하기 위해 X-선 회절 시험을 시행하였으며, 각각의 조성별로 ICP측정결과 여러 조성들($LiNi_xNm_{2-x}O_4\;0{\leq}x{\leq]0.5$) 중 $LiNi_{0.3}Nm_{1.7}O_4$의 분말이 비교적 우수한 특성을 나타내었지만, 전기화학적 특성 평가 결과 이론용량값에 미치지 못하는 용량값을 나타내었다. 이것은 분말 합성 시 미량의 미 반응된 유기물들이 분말 표면에 피복되어 전기적 성질을 변화시키고 있기 때문임을 확인하였다. 이러한 특성을 개선하고자 추가적으로 하소 공정을 실시하여 전지의 성능를 평가 하였다. 분말의 미세구조와 형태, 크기, 전기 화학적 특성을 관찰하여 하소 전 후의 분말을 비교하였다.

$TiOCl_2$를 중화시키고 과산화수소와 반응시켜 Ti peroxo 전구체를 수열합성법을 이용하여 autoclave 반응기 내에서 가열하여 $TiO_2$ 졸을 제조하였다. Autoclave 반응기 내에 압력을 가하면 브룩카이트상 $TiO_2$졸이 형성됨을 확인하였고, 중화과정에서 NaCl을 첨가하여 Ti 수산화물 격자 내에 Na 이온을 포획되어 브룩카이트상이 나타남을 알 수 있었다. Na 이온의 첨가량에 따라 브룩카이트 결정상 함량이 달라져 광촉매 활성도 달라짐을 브룩카이트상 $TiO_2$가 코팅된 박막의 기상벤젠 광분해 실험을 통해 확인하였고 미세구조, 결정성, 광흡수도률 측정하여 특성평가를 실시하였다.

It is widely know that one of the most important tasks is the research of plasma for the purpose o nuclear fusion, is to make a stable confinement of high ${\beta}$ value plasma. And, for making the stable confinement, pinch pl-asma produced by reversed field has been mainly studied yet. Magnetic field has been used to hold plasma at high temperature for a long time. Reverse field has shown unstable process. Using ratio frequency, the author could control the instability of the process and formed a stable erversed field. Inthe experiment let a reversed field configuration from by adding-Bias field in advance.

The analysis of the depth measurement system with multi-sensors (laser, camera, mirror) has been done and the parameter calibration technique has been proposed. In the proposed depth measurement system, the laser beam is reflected to the object by the rotating mirror and again the position of the laser beam is observed through the same mirror by the camera. The depth of the object pointed by the laser beam is computed depending on the pixel position on the CCD. There involved several number of internal and external parameters such as inter-pixel distance, focal length, position and orientation of the system components in the depth measurement error. In this paper, it is shown through the error sensitivity analysis of the parameters that the most important parameters in the sense of error sources are the angle of the laser beam and the inter pixel distance.

In this paper, the author describes a-C films grown in pure methane plasma without any diluent gas by using RF plasma-enhanced CVD, and the variations in their structural features and surface morphologies are examined as a function of substrate temperature. Raman spectroscopy and scanning electron microscopy were performed to characterize the properties of the film.

SBN60 and SBN60/30 thin films were deposited by ion beam sputtering technique. Using the ceramic target of the same composition and Pt(100)/$TiO_2$/$SiO_2$/Si or Pt(111)/Ti/$SiO_2$/Si substrate, crystallization and orientation behavior as well as electric properties of the films were examined, Thickness was controlled to $3000{\AA}$ and the films were heat-treated at $650^{\circ}C{\sim}800^{\circ}C$. The orientation and crystallization behavior were observed which showed the dependence on processing condition($O_2$/Ar ratio, substrate temp, annealing temp...).

최근 전력수요의 급증과 더불어 기기의 소형화와 경랑화를 위해 고분자절연재료의 사용이 증가하였으며, 근래 들어 환경성의 문제가 거론되면서 반영구적인 절연재료의 요구가 급증하였다. 그로 인하여 초고압 케이블의 절연재료로서 가교폴리에틸렌이 사용되어지고 있다. 이에 본 논문에서는 초고압전력용 케이블에서 절연재료로 사용되고 있는 가교폴리에틸렌 (XLPE) 내부전계분포 및 파괴전압과의 상관관계를 알아보기 위해 케이블에 칩 전극을 삽입하여 두께를 0.5, 1, l.5 [mm] 변화시켜 파괴전계를 검출하였으며, 또한 와이블 해석을 통한 파괴전압의 척도파라미터룰 검출하여, 시뮬레이션 인가전압으로 사용하였다. 시뮬레이션 경계요소법 (BEM)을 이용한 3 차원 전계해석 프로그램으로 조사하였다.

차세대 반도체 공정을 위한 많은 노력 중 미세가공의 중요성이 날로 증가함에 따라 reactive ion etching (RIE)에 대한 연구 또한 그 중요성이 커지고 있으며, 현재 제조공정 라인에서는 공정상의 오류를 줄이는 노력에 주목하고 있다. 본 논문에서는 RIE 과정에서 etch rate과 uniformity에 영향을 줄 수 있는 요인 4 가지 즉, $CHF_3$, $O_2$ chamber pressure, RF power의 변화에 대해 실험 계획법 (DOE)을 통해 실험을 계획하고, 실험한 후 neural networks. 를 통해 학습함으로서 RIE 공정상의 최적화률 모색하였다.

In this study, the Al doped ZnO thin films were prepared by the facing targets sputtering(FTS) apparatus. The electrical characteristics, transmittance of ITO thin films were investigated as a function of varying input current and oxygen gas flow rate. As a result, the ITO thin film was prepared with a resistivity $6{\times}10-4[{\Omega}-cm]$ and transmittance 80% at visible range.

The quench characteristics of flux-lock type high-Tc superconducting fault current limiters(SFCL) was investigated, $YBa_2Cu_3O_{7-x}$(YBCO) thin film was used as the current limiting elements of the flux-lock type SFCL. The quench characteristics of current limiting elements consisting of the flux-lock type SFCL was more improved than that of the resistive type SFCL.

The surface properties of electrical devices studied by fractal phenomenon were investigated. The SEM photographs of devices surface were changed by binary code and it were analyzed by fractal dimension. The void of devices surface was found by fractal program. The relation between grain density and electrical properties are able to expect to fractal dimension. The grain size in varistors surface was decreased by increasing of oxide antimony addition. The fractal dimension and electrical properties of devices surface was related to between grain boundary and grain density. The grain size was decreased by increasing of fractal dimensions.

Carbon nitride ($CN_X$) films were prepared by reactive RF magnetron sputtering system at various deposition conditions and the C-V characteristics of MIS(metal - insulator - semiconductor) capacitors that have the structures of Al/$CN_x$/p-Si/Al and Al/$CN_x$/$Si_3N_4$/p-Si/Al were investigated. The resistivity of carbon nitride was above $2.40{\times}10^8{\Omega}{\cdot}cm$ at room temperature. The C-V plot showed a typical capacitance-voltage characteristics of semiconductor insulating layers, while it showed hysterisis due to interface charges. Amorphous carbon nitride (a-$CN_x$) films, that have relatively high resistivity and low dielectric constant could be useful as interlayer insulator materials of VLSI(very large-scale integration) and ULSI(ultra large-scale integration).